| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film laminated element, together with its manufacturing method of high efficiency and low cost, which comprises many individual information and a discrimination symbol formed at a low cost. SOLUTION: A thin-film laminated element 14 comprises, on a formation point assigned at vertex of a square, a discrimination symbol 16a which indicates information based on the presence of a round bit mark. A wafer lot number for discriminating each wafer 10 is suitable as being one for the information, indicated with the discrimination symbol 16a. The discrimination symbol 16a is provided, by arranging a mask 20 comprising a through-hole 22 for forming the bit mark on the wafer 10, where a photoresist film is formed, which is moved by a prescribed distance in horizontal direction from a reference point for exposure, and then removing by etching the exposed part or its surrounding or laminating a thin film on the part.
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