| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor test apparatus in which the SCAN operation time can be shortened by improving a SCAN operation in relieving and analyzing operation so that a read-modify-write-operation is performed only when an FAIL exists. SOLUTION: This apparatus is provided with a memory for counting for rows for storing and updating the number of times of occurrence of defective cells for each row address line by a read-modify-write-operation, a memory for counting for columns for storing and updating the number of times of occurrence of defective cells for each column address line by a read-modify-write- operation, and a means for controlling the operation so that, in SCAN operation, when fail information read out from AFM detects that fail does not exist, the read-modify-write-operation of the memory for counting is not performed, but only a read-operation is performed, and then read-out of the address is performed. The operation speed of count processing of the SCAN operation in the relieving and analyzing operation is thus increased.
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