发明名称 METHOD FOR MANUFACTURING HIGH WITHSTAND VOLTAGE SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To reduce the number of mask processes and heat treatment processes in the manufacture of a high dielectric strength bipolar transistor. SOLUTION: By forming a PSG layer on a substrate, a protective film on a region in which a depletion layer is spread, a protective film for the protection from external contamination can be formed simply, and phosphorus treatment and formation of an emitter region can be practiced simultaneously. The reasonable low cost operation, for instance only four mask processes are required, can be realized, therefore, in the manufacture of a high dielectric strength semiconductor device.
申请公布号 JP2002043325(A) 申请公布日期 2002.02.08
申请号 JP20000226618 申请日期 2000.07.27
申请人 SANYO ELECTRIC CO LTD 发明人 OKADA TETSUYA;SAITO SHINSUKE;SAYAMA YASUYUKI
分类号 H01L29/73;H01L21/225;H01L21/322;H01L21/331;H01L29/732;(IPC1-7):H01L21/331 主分类号 H01L29/73
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