发明名称 |
MAINTENANCE METHOD OF PROCESSOR |
摘要 |
PROBLEM TO BE SOLVED: To provide a maintenance method of a processor by which device operation can be combined optionally. SOLUTION: The single operation of a part to be the maintenance object of the processor is registered in advance (S10). The single operation registered at the S10 is combined optionally to prepare a maintenance macro file as sequence operations and/or parallel operations (S20). The prepared maintenance macro file is carried out and maintenance is performed by this (S30). The performed sequence operations and parallel operations are evaluated (S40).
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申请公布号 |
JP2002043290(A) |
申请公布日期 |
2002.02.08 |
申请号 |
JP20000222622 |
申请日期 |
2000.07.24 |
申请人 |
TOKYO ELECTRON LTD |
发明人 |
TAWARA KAZUSHI;KOO AKIRA;KATO SHIGEAKI |
分类号 |
H01L21/302;H01L21/205;H01L21/3065;(IPC1-7):H01L21/306 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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