发明名称 MAINTENANCE METHOD OF PROCESSOR
摘要 PROBLEM TO BE SOLVED: To provide a maintenance method of a processor by which device operation can be combined optionally. SOLUTION: The single operation of a part to be the maintenance object of the processor is registered in advance (S10). The single operation registered at the S10 is combined optionally to prepare a maintenance macro file as sequence operations and/or parallel operations (S20). The prepared maintenance macro file is carried out and maintenance is performed by this (S30). The performed sequence operations and parallel operations are evaluated (S40).
申请公布号 JP2002043290(A) 申请公布日期 2002.02.08
申请号 JP20000222622 申请日期 2000.07.24
申请人 TOKYO ELECTRON LTD 发明人 TAWARA KAZUSHI;KOO AKIRA;KATO SHIGEAKI
分类号 H01L21/302;H01L21/205;H01L21/3065;(IPC1-7):H01L21/306 主分类号 H01L21/302
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