| 摘要 |
PROBLEM TO BE SOLVED: To provide a system capable of evenly reforming the surface of a body which is processed even under non-vacuum atmosphere. SOLUTION: An ultraviolet processing system 100 comprises a chamber 1 having a ceiling made by ultraviolet transmitting materials, an ultraviolet lamp 9 fixed on the ceiling, and a plurality of pipes 11 for supplying gas containing active oxygen and processed irradiating ultraviolet to a body W, wherein each of the pipes 11 comprises an air supply section 11a extending from a gas supply source to the vicinity of the ceiling, a diffusion section 11b expanding in a direction of surface along the ceiling surface, and a plurality of nozzle sections 11c penetrating the ceiling.
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