PLASMA TREATMENT SYSTEM

摘要

PROBLEM TO BE SOLVED: To keep constant the status of the wall surface of a vacuum container in a plasma treatment system. SOLUTION: A vacuum container wall 1 is divided electrically insulated by a spacer 2. High frequency electricity generated from a high frequency power source 7 is supplied to a switching circuit 4 to form an ion sheath on the front surface of the wall without being reflected by an impedance matching device 6 and a capacitor 5. Switching circuit 4 supplies high frequency electricity to the divided wall temporally in order. Accumulated coating thickness is controllable by a sputter etching reaction using the ion sheath on the front surface of divided wall 8 to which high frequency electricity is applied. Almost full states of the wall surface of the vacuum container which plasma contacts are controllable by switching divided wall 8 to which high frequency electricity is applied in order with a certain span.