POWER SOURCE DEVICE FOR GENERATING HIGH FREQUENCY AC PULSE

摘要

PROBLEM TO BE SOLVED: To provide a power source for generating a high frequency AC pulse which is effective for improving a dry etching device in a semiconductor manufacturing process. SOLUTION: A single plus voltage variable power source is inputted to a single high frequency transformer to turn on/off a power MOS FET corresponding to required AC voltage and current, thereby a high frequency AC pulse in which a negative voltage generation pulse time is longer than a positive voltage generation pulse time can be outputted to a load for example.