发明名称 LIQUID TREATING DEVICE FOR FILM CARRIER TAPE FOR MOUNTING ELECTRONIC COMPONENT
摘要 PROBLEM TO BE SOLVED: To provide the liquid treating device of a film carrier tape for mounting electronic components capable of uniformly discharging treating liquid over the entire width of the film carrier tape for mounting the electronic components on the upper surface of the film carrier tape for mounting the electronic components, and uniformly executing liquid treatment without lowering the liquid treatment ability by oxidizing and degrading the discharged treating liquid and generating bubbles. SOLUTION: For the treating liquid discharged from an inner pipe slit formed on a treating liquid supply inner pipe, a discharge pressure is adjusted inside a treating liquid pressure adjustment chamber. Also, the treating liquid is discharged in a liquid film shape through a discharge slit formed on a discharge nozzle outer pipe, so as to turn the discharge width to be the same width as the discharge opening width of the discharge slit formed on the discharge nozzle outer pipe by a straightening member.
申请公布号 JP2002043371(A) 申请公布日期 2002.02.08
申请号 JP20000222661 申请日期 2000.07.24
申请人 MITSUI MINING & SMELTING CO LTD 发明人 KOURA SADAHIKO;NARABAYASHI TETSUYUKI;KATSUTE TOSHIO;KATO RYOJI
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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