| 摘要 |
PROBLEM TO BE SOLVED: To provide a device/method for feeding gas, capable of reducing an installation/operation cost for feeding gas. SOLUTION: The gas-feeding device has a gas container 11 installed in the neighborhood of a processing chamber 2, and this container 11 is connected to the chamber 2 through a gas piping 12. The container 11 has a container main body 15, which is freely attachable and detachable to/from a base part 16. A main gas chamber 17 is provided in the main body 15 and filled with plural kinds of gas including process gas in the state of being mixed in a prescribed ratio. This mixed gas is filled with pressure at the level of atmospheric pressure. When the mixed gas in the main body 15 is consumed, the main body 15 is replaced with another main body 15 filled with a similar mixed gas.
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