| 摘要 |
PROBLEM TO BE SOLVED: To provide a conductive member, together with its manufacturing method, which comprises a conductive thin film of good reproducibility on a base material by a vacuum film-forming technology and of a specific resistance value where an in-surface resistance distribution is even. SOLUTION: A conductive member 1 in which a conductive thin-film 20 is formed on a base material 10 is provided where the film structure of the conductive thin-film 20 is a pillar structure with its specific resistance value being 1.5×10-3Ωcm or higher, otherwise, the film structure of the conductive thin-film 20 is a tight crystal structure with its specific resistance value being 1.0×10-3Ωcm or lower. Related to the manufacturing method of the conductive member 1, the pressure at forming the conductive thin film 20 and/or the temperature of the base material 10 is changed top change the film structure of the conductive thin film, with its specific resistance value set, for controlling.
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