| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer transfer system capable of transferring. one wafer per one time by a robot and capable of shortening the time for replacement of processed wafers and unprocessed wafers. SOLUTION: The wafer transfer system is provided with an intermediate cassette device 30 having a plurality of stages of wafers supporting parts 21, an arm type robot 50 for transferring wafers 22, an aligner for aligning the wafers 22, and a supplying/housing cassettes 60 for the wafers 22. The system is constituted in such a way that, for the intermediate cassette device 30, the wafers 22 held by the arm type robot 50 are transferred to the aligner. After aligning, the wafers are directly delivered from the aligner to wafer supporting parts 21 in the intermediate cassette device 30. |
