| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a resin-film-coated substrate that can prevent warping of the substrate, and the resin-film-coated substrate manufactured with this method. SOLUTION: A fluid 43 in which a resin ingredient is solved in a first solvent is applied on a substrate 41, and only the first solvent is evaporated to form a dried resin film 44 on the substrate 41. After then, cracks 51 are formed on the dried resin film 44 by adhering a second solvent to prescribed regions of the dried resin film 44. As a result, tensile stress acting on the dried resin film 44 is reduced, and warping of the substrate 41 is reduced. |
