发明名称 SOLDER BUMP FORMATION DEVICE, SOLDER BUMP FORMATION METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR THEREBY
摘要 PROBLEM TO BE SOLVED: To provide a solder bump formation device capable of stably discharging fused solder. SOLUTION: In this solder bump formation device provided with a nozzle and a fused solder chamber for housing the fused solder for discharging the fused solder from the nozzle and forming a solder bump, the nozzle is provided with a straight part and a tapered part widened on the side of the fused solder chamber. The liquid level of the fused solder before discharge is stopped at the boundary of the tapered part and straight part of the nozzle.
申请公布号 JP2002043351(A) 申请公布日期 2002.02.08
申请号 JP20000224028 申请日期 2000.07.25
申请人 MITSUBISHI ELECTRIC CORP;MITSUBISHI ELECTRIC ENGINEERING CO LTD 发明人 NAKASU YASUFUMI;FUKUMOTO HIROSHI;YAMAGUCHI SHINJI
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址