| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic suction device for electrostatically sucking a flexible film which will not require troublesome works, makes surface treatment work in vacuum and will not cause wrinkles, deformations, peeling-offs in the film, when the surface treatment works, and its electrostatic suction method. SOLUTION: A positive electrode 1 and a negative electrode 2 are disposed by surrounding each electrode alternately the other on the surface of an insulating dielectric layer 5 and making each outermost edge same polarity and the distance between both electrodes is set between one to ten times the thickness of an insulating dielectric layer 4. The average roughness on the center line of an electrostatic suction surface 6 is made 0.5μm or less and the volume specific resistance is set at 108-1012Ω.cm. The area of an electrode 3 for the electrostatic suction on the electrostatic suction surface 6 is composed of 10-80% of the area a flexible film 20, which is brought into contact with the electrostatic adsorption surface 6 and the outermost edge of the electrode 3 for the electrostatic suction is made to the outermost edge of the flexible film 20 is made to protrude by making the protruding length 4 mm or less. After electrostatic suction of the flexible film 20, either the electrostatic suction voltage is lowered or the application of the electrostatic suction voltage is stopped. |
