HEAT TREATMENT METHOD OF OBJECT TO BE TREATED

摘要

PROBLEM TO BE SOLVED: To provide the heat treatment method of an object to be treated, which is capable of continuously and speedily performing two heat treatments in different temperature ranges. SOLUTION: The heat treatment method for prescribed heat treatment to the object to be treated W continuously at different temperatures by using a mounting table 34 heated by a heating means 36 in a treatment container 4 which can be evacuated includes the first heat treatment process giving the first heat treatment to the object by the first process pressure and at the first process temperature and the second heat treatment process giving the second heat treatment to the object by the second process pressure higher than the first process pressure and at the second process temperature higher than the first process temperature. Thus, the two heat treatments in the different temperature ranges are performed continuously and speedily.