发明名称 METHOD FOR DEPOSITING A FLUORINE-DOPED SILICA FILM
摘要 <p>The invention concerns a method which consists in evaporating silicon oxide to form a silicon oxide film at the surface of a substrate and in bombarding said silicon film, while it is being formed, with a beam of positive ions derived from both a polyfluorocarbon compound and a rare gas. The invention is useful for producing low-index antiglare films.</p>
申请公布号 WO2002011195(A1) 申请公布日期 2002.02.07
申请号 FR2001002505 申请日期 2001.07.31
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