发明名称 METHOD FOR COMPLEMENTARY OXIDE TRANSISTOR FABRICATION
摘要 A method of manufacturing an integrated circuit device includes forming a laminated structure having a first side and a second side, the first side includes a first type Mott channel layer and the second side includes a second type Mott channel layer. A first source region and a first drain region is formed on the first side, a second source region and a second drain region is formed on the second side, a first gate region is formed on the second side, opposite the first source region and the first drain region and a second gate region is formed on the first side, opposite the second source region and the second drain region. The first source, the first drain and the first gate comprise a first type field effect transistor and the second source, the second drain and the second gate comprise a second type field effect transistor.
申请公布号 US2002016030(A1) 申请公布日期 2002.02.07
申请号 US19990306509 申请日期 1999.05.07
申请人 MISEWICH JAMES A.;SCHROTT ALEJANDRO G.;SCOTT BRUCE A. 发明人 MISEWICH JAMES A.;SCHROTT ALEJANDRO G.;SCOTT BRUCE A.
分类号 H01L29/12;H01L21/8238;H01L27/092;H01L29/786;(IPC1-7):H01L21/823 主分类号 H01L29/12
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