| 摘要 |
A wafer carrying system includes an intermediate cassette device having a plurality of wafer support holders, a robot arm device to carry wafers, an aligner unit to align the wafers, and a wafer feed and storage cassette. The wafers held by the robot arm device are transferred to the aligner unit are aligned in the intermediate cassette device, and are then directly delivered from the aligner unit to the wafer support holders of the intermediate cassette device.
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