SURFACE SHAPE MEASURING SYSTEM

摘要

A lattice (3) is disposed to face the measured surface of a measurement object (11), and is illuminated by light from a light source (1). A camera (6) captures a Moire fringe image formed on the lattice (3) by light passing through the lattice (3) and reflected off the measured surface. A moving means (9) changes the distance (H) between the lattice (3) and the measured surface. An analyzing means (8) conducts, for at least two different distances (H), an analysis process of determining the 3-D shape information of the measured surface from an image picked up by the camera (6), and determines true 3-D shape information free from measurement errors due to the inclination of the measured surface based on 3-D shape information and distances (H) at respective distances.