发明名称 Vapor deposition temperature control apparatus and method
摘要 Coating temperature during vapor deposition of a ceramic coating on a substrate in a coating box or enclosure is maintained by means of a heat release cover or lid on the coating enclosure and movable in response to temperature in the coating enclosure exceeding a predetermined value so as to release excess heat from the enclosure to maintain coating temperature within an appropriate range.
申请公布号 US2002015788(A1) 申请公布日期 2002.02.07
申请号 US20010965432 申请日期 2001.09.27
申请人 HOWMET RESEARCH CORPORATION 发明人 CALLAWAY MARTIN A.;ADAIR ROBERT D.;MURPHY KENNETH S.;MANIURSKI THEODORE J.
分类号 C23C14/54;(IPC1-7):C23C16/00 主分类号 C23C14/54
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