| 摘要 |
The present invention relates to a FOUP door opening apparatus capable of stably supporting a FOUP door, implementing a smooth door locking and unlocking operation and preventing a particle from being introduced into the system when opening a FOUP door. The FOUP door opening apparatus includes a door opening unit having a front end having a latch key and a rear end having a worm wheel wherein the work wheel is engaged with a worm, and the worm is connected with a driving motor shaft, a particle discharging unit which has a suction hole at a certain portion wherein the suction hole is connected with a suction and discharging unit having a certain pressure for thereby sucking and discharging the particles to the outside when opening the door, and a door support unit which includes buffering rollers installed at both ends of the latch key for enhancing a contact feel and implementing a door support based on an expansion force of the compressed air before the FOUP door is opened.
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