发明名称 |
Wire-saw for cutting semiconductor wafers from single-crystal workpieces, includes supply device for supplying compensating sawing wire to wire guide rollers |
摘要 |
A wire-saw for severing a number of discs or wafers from a workpiece i.e. a single crystal and comprises a saw-wire of a finite length with bonded cutting grain, and in which the part of the cutting wire wound around the wire guide rollers is significantly longer than the reserve of wire of the supply device.
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申请公布号 |
DE10035590(A1) |
申请公布日期 |
2002.02.07 |
申请号 |
DE20001035590 |
申请日期 |
2000.07.21 |
申请人 |
WACKER SILTRONIC GESELLSCHAFT FUER HALBLEITERMATERIALIEN AG |
发明人 |
EGGLHUBER, KARL |
分类号 |
B23D57/00;B28D5/04;(IPC1-7):B23D57/00;B28D1/02;H01L21/304 |
主分类号 |
B23D57/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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