发明名称 Wire-saw for cutting semiconductor wafers from single-crystal workpieces, includes supply device for supplying compensating sawing wire to wire guide rollers
摘要 A wire-saw for severing a number of discs or wafers from a workpiece i.e. a single crystal and comprises a saw-wire of a finite length with bonded cutting grain, and in which the part of the cutting wire wound around the wire guide rollers is significantly longer than the reserve of wire of the supply device.
申请公布号 DE10035590(A1) 申请公布日期 2002.02.07
申请号 DE20001035590 申请日期 2000.07.21
申请人 WACKER SILTRONIC GESELLSCHAFT FUER HALBLEITERMATERIALIEN AG 发明人 EGGLHUBER, KARL
分类号 B23D57/00;B28D5/04;(IPC1-7):B23D57/00;B28D1/02;H01L21/304 主分类号 B23D57/00
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