| 摘要 |
High temperature substance sensor, including a substrate (4), a device (6) for raising and maintaining the temperature of the sensor, and a layer like capacitor structure (38) with structure sizes smaller than 50 mum, upon which a functional layer (18) is applied. In accordance with the invention the layer-like capacitor structure (38) is produced by the following: application of a complete or already pre-structured electrically conductive layer as precursor of the capacitor structure (38) using a thick layer technique, structuring the electrically conductive layer using a photolithographic structuring process.
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