| 摘要 |
There is provided a wire bonding apparatus operated steadily at a high speed without excitation of vibrations of an XY stage 102 and a capillary 104, which are movable parts. The wire bonding apparatus is configured so as to have a composite target path generating section 208 for generating a target path 109, in which the deceleration part of a go path and the acceleration part of a return path are composed to one continuous path, for a path part of reciprocating movement of said target path indicating a motion process of either one or both of the XY stage and capillary. Therefore, the period of a composite target acceleration path can be set long while the required time until the end of path is shortened, and the wire bonding apparatus can be operated steadily at a high speed without excitation of vibrations of the XY stage and capillary, which are movable parts. |
