| 摘要 |
<p>A defect analysis method for analyzing a defect occurring in a semiconductor device by using bit map data created as a result of a test conducted by means of a tester (10) having a memory (11). The defect analysis method is executed on a computer system. A processor (21) reads bit map data from a memory (11), writes the coordinate values of all the defective bits in the bit map data in a memory (22), refers to the coordinate values in the memory (22), counts the defective bits occurring at each coordinate point, and makes the count the defective bit frequency H(i) corresponding to each coordinate point, and calculates the coefficient r (μ) of auto-correlation with respect to a period μ from all the defective bit frequencies H(i).</p> |
