THIN CAPACITIVE STRUCTURES AND METHODS FOR MAKING THE SAME

摘要

A capacitor and a method of making the capacitor is provided. The capacitor includes a metallization line with a high dielectric constant layer defined over the metallization line. A thin metallization film is defined over the high dielectric constant layer, such that the thin metallization film defines a top plate of the capacitor, the high dielectric constant layer defines a dielectric for the capacitor, and the metallization line defines a bottom plate for the capacitor. The metallization line is defined from a metallization level and the thin metallization film is defined before a next metallization level above the metallization level is defined.