发明名称 Method of manufacturing semiconductor devices by dividing wafer into chips and such semiconductor devices
摘要 A plurality of chips divided from a semiconductor wafer having a plurality of semiconductor integrated circuits formed on a front surface of the wafer, are prepared, front surfaces of the chips being bonded to a first wafer sheet. The back and side surfaces of each chip bonded to the first wafer sheet are covered with a reinforcing thin film. Each of the plurality of chips is removed from the first wafer sheet. The flexural strength of a chip can be suppressed from being lowered by chipping and chip cracks.
申请公布号 US2002014661(A1) 申请公布日期 2002.02.07
申请号 US20000735476 申请日期 2000.12.14
申请人 FUJITSU LIMITED 发明人 OKAMOTO TADAHIRO;MATSUKI HIROHISA
分类号 H01L21/301;H01L21/44;H01L21/46;H01L21/68;H01L21/78;H01L23/00;H01L23/31;H01L27/01;H01L27/12;H01L31/0392;(IPC1-7):H01L27/01;H01L31/039 主分类号 H01L21/301
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