PROCESSES FOR PREPARATION OF 2-ALKYL-2-ADAMANTYL ESTERS

摘要

A process for preparation of 2-alkyl-2-adamantyl esters which comprises reacting a magnesium halide salt of a 2-alkyl-2-adamantanol with an acyl halide such as acryloyl chloride in the presence of a tertiary amine. A process for preparation of 2-alkyl-2-adamantyl esters which comprises reacting a 2-alkyl-2-adamantanol with a carboxylic acid such as acrylic acid in the presence of both an acid catalyst such as concentrated sulfuric acid and a desiccating agent consisting of an acid or neutral inorganic compound (such as magnesium sulfate) which is solid in a dry state at ordinary temperatures or a water-absorbent polymer. The esters are important as raw material of the resist for the production of semiconductor devices.