PLASMA RESISTANT ELEMENT AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a low cost plasma resistant element and its manufacturing method having high plasma resistant property also excellent in mechanical properties such as bending strength and toughness. SOLUTION: This plasma resistant element 15 is characterized by having a base material 13 consisting of a ceramics group sintered body and a fluoride layer 14 of the thickness 1 to 100μm containing not less than one kind of element selected from the periodic table IIA group elements and IIIA group elements formed on the surface of the above base material 13.