SCALE MEMBER, ITS MANUFACTURING METHOD AND DISPLACEMENT GAGE TO USE THE SAME

摘要

PROBLEM TO BE SOLVED: To provide both a displacement gage with a contact-type probe capable of performing simple and highly accurate displacement measurement on a micro object to be measured and an object to be measured such as a section in the back of a complicated structure and its manufacturing method. SOLUTION: The scale member 1 is comprised of a spindle 11 movably supported by parallel plate springs 13 on a scale-side substrate 15 and a scale 12 with slits fixed to the spindle 11. The scale 12 is held by the parallel plate springs 13 so as to move with the spindle 11 in the direction of a measuring axis. The spindle 11, the scale 12, and the parallel plate springs 13 are integrally structured and slightly lifted from the scale substrate 15, and only anchor parts 14 are fixed to the scale substrate 15. A displacement sensor 2 is constituted of a sensor-side substrate 18 opposed to the scale-side substrate 15 and a light source 16 and a light receiving element 17 arranged on the sensor-side substrate 18.