SCANNER AND THREE-DIMENSIONAL MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To improve the accuracy of triangulation by reducing the influence of non-linear errors of a galvano scanner. SOLUTION: Set target angle is made coincident with a real mirror angle by previously measuring the non-linear error of the galvano scanner 14, and correcting the angle setting signal S2 while anticipating the error. Or calculation of triangulation is performed by applying a corrected projection angle according to the error.