发明名称 METHOD AND DEVICE FOR CLEANING PROBE
摘要 PROBLEM TO BE SOLVED: To minimize the wear of a probe tip and cleanly remove a foreign matter in a short time. SOLUTION: This cleaning method for probe comprises heating a mixture of 70-95% water and 30-5% sulfuric acid in a temperature range of 50-85 deg.C, and dipping at least the tip of a probe arranged on a support body in the heated mixture. Accordingly, a foreign matter as rubbing dust adhered to the tip is dissolved and extinguished in a short time, but the tip is not dissolved.
申请公布号 JP2002040048(A) 申请公布日期 2002.02.06
申请号 JP20000218853 申请日期 2000.07.19
申请人 MICRONICS JAPAN CO LTD 发明人 SHO MASAHIKO
分类号 G01R1/06;G01R31/28;H01L21/66;(IPC1-7):G01R1/06 主分类号 G01R1/06
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