发明名称 PACKAGE FOR PRESSURE DETECTION APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a small, high-sensitivity pressure detection apparatus capable of accurately detecting external pressures over a long period of time. SOLUTION: In this package for the pressure detection apparatus, a first metallized electrode 7 for forming an electrostatic capacity is provided on one principal surface of a ceramic base 1 having a semiconductor device 3 mounted on the other principal surface thereof, and a ceramic plate 2 having on the inner principal surface thereof a second metallized electrode 9 opposed to the first metallized electrode 7 for forming an electrostatic capacity, and also having a reinforcing metallized layer 10 on the outer principal surface thereof, is flexibly joined with the ceramic base 1 in such a way as to form a closed space therebetween.
申请公布号 JP2002039893(A) 申请公布日期 2002.02.06
申请号 JP20000223787 申请日期 2000.07.25
申请人 KYOCERA CORP 发明人 KINOMURA KOJI
分类号 G01L9/12;G01L9/00;H01L29/84;(IPC1-7):G01L9/12 主分类号 G01L9/12
代理机构 代理人
主权项
地址