| 摘要 |
PROBLEM TO BE SOLVED: To provide an internal hole surface inspecting device which can prevent measurement precision depending upon the focal length of an objective from decreasing and measure the internal diameter, uneven state, etc., of a hole part of a measured body with high precision. SOLUTION: The light beam emitted by a light source (32) is converged through a condenser lens (31) and further passed through a relay lens (23) to obtain nearly parallel luminous flux, which is guided in an optical lens barrel (20) to irradiate the internal hole surface of the measured body through a reflector (21) and an objective (22); and its reflected light is converged and guided in the optical lens barrel. Then the focusing state is detected from reflected light obtained through a beam splitter (34) to displace the condenser lens or relay lens along its optical axis (focus adjusting mechanism 33) and the distance between the objective and the internal hole surface of the measured body from the quantity of displacement of the condenser lens or relay lens when the focusing is detected (distance measuring means 39).
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