DEPOSITION SHIELD AND VACUUM FILM-FORMATION EQUIPMENT THEREWITH

摘要

PROBLEM TO BE SOLVED: To provide a more effective deposition shield which can be mounted easily without requiring much labor and time, and be stored without needing a wide space. SOLUTION: The deposition shield 21 for shielding a location other than a work-piece placed inside a body of an apparatus (such as a wall) from deposition of vaporized material, comprises being formed from a thin roll-shaped plate, having a concave or convexoconcave configuration on its surface 22 for preventing a film exfoliation, and consisting of an aluminum material of which the melting point is lower than that of the vaporized material.