DEVICE AND METHOD FOR GAP ADJUSTMENT

摘要

PROBLEM TO BE SOLVED: To provide a gap adjusting device which can be made low-cost. SOLUTION: A 1st stage and a 2nd stage are arranged opposite each other. A 1st target is fixed to the 1st stage. A 1st displacement sensor fitted to the 1st stage measures the distance from the 1st displacement sensor to some plane arranged in its front. A 2nd target is fixed to the 2nd stage. The 2nd displacement sensor fitted to the 2nd stage measures the distance from the 2nd displacement sensor to some plane arranged in its front. An eddy current sensor fitted to the 1st stage measures the distance to the target fitted to the 2nd stage. A moving mechanism moves one of the 1st and 2nd stages to the other.