| 摘要 |
PURPOSE: To provide a vacuum pump capable of efficiently heating a gas flow passage with a small power. CONSTITUTION: This vacuum pump is provided with an outer cylinder 16, a stator 18 housed in a hollow part of the outer cylinder 16, a rotor 14 housed in the hollow part of the outer cylinder freely to be rotated and forming a gas flow passage 17 with the stator 18, and a base 19 for supporting the outer cylinder 16 and the stator 18 by fixation. The base 19 is provided with a heating electromagnet 60 for heating with the electrifying thereof and for forming a magnetic field, a magnetic member 65 for forming a magnetic passage of the magnetic force by the heating electromagnet 60, and an aluminum heat radiating plate 67 fixed to the magnetic member 65.
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