发明名称 OPTICAL MODULATION ELEMENT AND EXPOSURE DEVICE AND FLAT DISPLAY DEVICE USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an optical modulation element which is low in driving voltage, enables to make large area inexpensively, is produced easily and, moreover, has high picture quality and an exposure device and a flat display device using the same. SOLUTION: This optical modulation element 1 is provided with a substrate 3 which is transparent to modulated light, a light shielding film 23 which is formed on the transparent substrate 3 and blocks the transmission of light, an opening part 25 which is disposed on the transparent substrate 3 and has no light shielding film thereon, a pair of connection plates 11 comprising a flexible thin film of which the base end is freely rotatably fixed on the transparent substrate 3 through a shaft 17 and the tip becomes a free end, and a movable piece 5 of which the one end is freely rotatably fixed on the tip of one side connection plate 11 and the other end is freely rotatably fixed on the tip of other side connection plate 11, and which elastically deforms the connection plates 11 and, as a result, is selectively moved to either one position of the light shielding film 23 and the opening part 25 by electromechanical operation.
申请公布号 JP2002040337(A) 申请公布日期 2002.02.06
申请号 JP20000222463 申请日期 2000.07.24
申请人 FUJI PHOTO FILM CO LTD 发明人 KIMURA KOICHI
分类号 G02B26/02;G09F9/37;G09F13/32;G09F13/42;(IPC1-7):G02B26/02 主分类号 G02B26/02
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