| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve machining speed of a laser beam drilling machine by shortening the positioning and setting time of a galvanoscanner. SOLUTION: The controller is provided with a rotational angle sensor 12 for detecting the rotational angle of a scanner motor 11 which drives a mirror for scanning, a calculation part which calculates stabilization time required for the stabilization of the rotational motion of the mirror is adjusted and decided on the basis of the difference between a command value of the angle of the motor given to the scanner motor and the preceding command value of the angle of the motor given at the preceding irradiation, a control circuit 13 of the position of the motor, which determines whether the rotational angle of the scanner motor detected by the rotational angle sensor is within the predetermined stabilized state for the command value of the angle of the motor, outputs a completion signal of the positioning when the rotational angle of the scanner motor is within the predetermined value, and drives the scanner motor according to the command value of the angle of the motor, and a delay circuit 14 which outputs the completion signal of the stabilization, which makes the decision that the stabilization of the rotational motion of the mirror is completed after the stabilization time calculated by clocking the stabilization time elapses from the time when the completion signal of positioning is received.</p> |
