| 摘要 |
PROBLEM TO BE SOLVED: To reduce the cost and restrain contamination of vacuum space in a vacuum gate valve by preventing dust generated from a valve element driving part or the like from being diffused in a simple constitution. SOLUTION: Sliding part covers 70, 71, 72 locally cover the sliding parts of at least either rear guide rollers 24, 24 for guiding the movement of a valve plate support 15 between a valve opening position and a valve closing position or parallel link mechanisms 44, 44 provided between a valve plate 34 and the valve plate support 15 and supporting to separate the valve plate 34 and the valve plate support 15 from each other in the valve closing position of the valve plate support 15.
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