| 摘要 |
PROBLEM TO BE SOLVED: To provide vibration control structure being excellent in active vibration cut-off performance at a high frequency area where a natural frequency is low and besides capable of performing control of vibration with multidimensional multidegree of freedom as excellent active vibration cutoff performance at a low frequency area is maintained. SOLUTION: Vibration control is effected on an upper surface plate 5, being a member to be controlled, in a horizontal direction by a vibration control device 3 having a working probe 15, and vibration control in a vertical direction is effected by working probes 35a and 35b. In the vibration control devices 2 and 3, vibration control rubbers 13 and 33 are situated in series between piezoactuators 12a, 12b; 32a, 32b, 32c and drive plates 17 and 37.
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