发明名称 MASK FOR PATTERNING ELECTRO-CONDUCTIVE FILM
摘要 PROBLEM TO BE SOLVED: To provide a mask for patterning an electro-conductive film, which prevents an occurrence of a display failure in a liquid crystal display in a low cost and superior productivity, by inhibiting an occurrence of a scratch on a substrate and preventing an exfoliation of a protection film. SOLUTION: The mask with an open end corresponding to the electro- conductive film formed part, for patterning the electro-conductive film by forming the electro-conductive film through the open end in a state that the mask is brought into contact with a substrate, is characterized by being provided with convexoconcave on a contacting face of the mask with the substrate.
申请公布号 JP2002038254(A) 申请公布日期 2002.02.06
申请号 JP20000221891 申请日期 2000.07.24
申请人 TORAY IND INC 发明人 OKAMURA MASANORI;OGAWA MASAYUKI;OKAMOTO TORU
分类号 C23C14/04;C23C16/04;(IPC1-7):C23C14/04 主分类号 C23C14/04
代理机构 代理人
主权项
地址