发明名称 Method of manufacturing a MOSFET
摘要 A lateral MOSFET (100) and a method for making the same. A two layer raised source/drain region (106) is located adjacent a gate structure (112). The first layer of the raised source drain is initially doped p-type and the second layer of the raised source/drain region is doped n-type. P-type dopants from first layer are diffused into the substrate to form a pocket barrier region (105). N-type dopants from second layer diffuse into first layer so that it becomes n-type and into the substrate to form source/drain junction regions (104) . P-type pocket barrier region (105) thus provides a barrier between the source/drain junction regions (104) and the channel region (108). <IMAGE>
申请公布号 EP0923118(A3) 申请公布日期 2002.02.06
申请号 EP19980309962 申请日期 1998.12.04
申请人 TEXAS INSTRUMENTS INC. 发明人 RODDER, MARK S.
分类号 H01L29/78;H01L21/28;H01L21/336;H01L29/08;H01L29/10;H01L29/423 主分类号 H01L29/78
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