| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-temperature testing device capable of constituting a high-temperature testing environment at a low cost. SOLUTION: When a current is carried to an object to be tested (semiconductor device 3), the object is self-heated. The temperature of the self-heating is measured by a temperature measuring means (temperature measuring device 6). When the measured temperature is a regulated value or more, a temperature control means (variable resistor 8) is controlled, and the air quantity of a temperature control means (cooling fan 7) is adjusted to cool the object to the regulated value, whereby a high-temperature test is performed.
|
