| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that a conventional collision prevention sensor which is a contact sensor possibly collides against and breaks equipment and an object because of its inertia even when it is stopped immediately immediately after detection and the operation efficiency of the equipment becomes low when the moving speed is made slow to prevent the collision. SOLUTION: This collision prevention sensor which is made subminiature has a proximity sensor, a contact sensor 2, and their processing circuit 4 adjacently on the same substrate and can stop the equipment immediately after contacting is detected by the contact sensor 2 by reducing the moving speed of the equipment on detecting an approach to an object through the proximity sensor 3.
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