摘要 |
PURPOSE: A substrate voltage generator of a semiconductor device is provided to product a stable substrate voltage by minimizing the influence due to voltage modulation. CONSTITUTION: A variable oscillator(440) varies an oscillation period in accordance with supplied current level. A charge pump(450) pumps the output of the variable oscillator(440) to generate a substrate voltage. A potential detector(400) detects the potential of the substrate voltage to enable the variable oscillator(440). A source voltage sensing part supplies a source voltage sensing signal corresponding to the source voltage. A comparator(420) compares the reference voltage from A reference voltage generator(410) with the source voltage sensing signal. A power supply(430) regulates the current level supplied to the variable oscillator(440) in accordance with the output of the comparator(420).
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