PIEZOELECTRIC SENSOR

摘要

PROBLEM TO BE SOLVED: To preclude a large piezoelectric ceramic particle from existing in a piezoelectric layer. SOLUTION: A process for classifying piezoelectric ceramic powder 2 to be kneaded preliminarily with a polymer material 1 is provided before a piezoelectric layer 8 is formed. The ceramic particles and the polymer material are kneaded preliminarily using a device capable of applying shearing force when kneaded. A large particle size of piezoelectric ceramic is eliminated in the piezoelectric layer by passing through the process to realize a piezoelectric sensor stable in polarization processing, excellent in reliability, and excellent in mass-productivity.