PLASMA-RESISTANT ALUMINA CERAMIC AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an inexpensive alumina ceramic excellent in plasma resistance and provide a method for producing it. SOLUTION: A plasma-resistant alumina ceramic is composed mainly of Al2O3 having an average crystal grain diameter of 10-40 μm. The Al2O3 contains YAG (Y3Al5O12) with an average crystal grain diameter of 0.1-1 μm. The number of YAG grains contained in Al2O3 is >=20 in the region of 10 μm×10 μm.