| 摘要 |
PROBLEM TO BE SOLVED: To provide a radiation image pickup device which has fluorescent material split members having a high aspect ratio and also has both high sensitivity and high resolution even though the cost is low. SOLUTION: In the figures, 101 is an image pickup element, 102 a photoelectric conversion part, 103 pixels, 104 and adhesive layer between a fluorescent material structure and an image pickup element, 105 needle-like crystal bodies of silicon, 106 fluorescent materials charged among needle-like crystal bodies, 107 a silicon substrate obtained by growing the needle-like crystal bodies, and 108 a mounting area for a peripheral circuit, etc. On the silicon substrate 107 of plane (111), a gold film Au is made to form a dot pattern 202 of 40μm in array pitch and 15μm in diameter. Then when the substrate 107 is heated in hydrogen gas H2, saturated with silane gas SiH4 and silicon tetrafluoride gas SiCl4, silicon in the saturated state is deposited as needle-like crystal bodies 105 on base silicon crystal along the axis <111> of the silicon substrate.
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