| 摘要 |
<p>The application discloses a trace oxygen measuring apparatus (40) capable of measuring accurately a concentration of a trace oxygen contained in various gases by using a limiting current type oxygen sensor having an improved output linearity within a region of the trace amount of oxygen, and taking the difference in pump current between the measurement gas from which oxygen has been removed and the measurement gas itself, and a measuring method using the same. Furthermore, the present application relates to a device for generating oxygen in a trace amount (42); said device being usable for testing of the effect of trace oxygen, particularly to a device for generating oxygen in a trace amount usable as a device for calibration in a trace oxygen measuring apparatus usable for control of a manufacturing process of various industrial gases containing a trace combustible gas and trace oxygen therein, and a trace oxygen generating apparatus using said device for generating oxygen in a trace amount and a trace oxygen generating method using the same. <IMAGE></p> |
